Low-temperature bottom-up integration of carbon nanotubes for vertical interconnects in monolithic 3D integrated circuits - researchr publication authors

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Sten Vollebregt, Ryoichi Ishihara, Johan van der Cingel, Kees Beenakker. Low-temperature bottom-up integration of carbon nanotubes for vertical interconnects in monolithic 3D integrated circuits. In Mitsumasa Koyanagi, Morihiro Kada, editors, 2011 IEEE International 3D Systems Integration Conference (3DIC), Osaka, Japan, January 31 - February 2, 2012. pages 1-4, IEEE, 2011. [doi]

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