A fWLR test structure and method for device reliability monitoring using product relevant circuits

Rolf-Peter Vollertsen, Georg Georgakos, K. Kölpin, C. Olk. A fWLR test structure and method for device reliability monitoring using product relevant circuits. In IEEE International Reliability Physics Symposium, IRPS 2015, Monterey, CA, USA, April 19-23, 2015. pages 3, IEEE, 2015. [doi]

Abstract

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