Nanopores created using an internal shadowmask process

L. J. de Vreede, J. W. Berenschot, N. R. Tas, W. T. E. van den Beld, J. T. Loessberg-Zahl, A. Van Den Berg, J. C. T. Eijkel. Nanopores created using an internal shadowmask process. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 74-78, IEEE, 2016. [doi]

@inproceedings{VreedeBTBLBE16,
  title = {Nanopores created using an internal shadowmask process},
  author = {L. J. de Vreede and J. W. Berenschot and N. R. Tas and W. T. E. van den Beld and J. T. Loessberg-Zahl and A. Van Den Berg and J. C. T. Eijkel},
  year = {2016},
  doi = {10.1109/NEMS.2016.7758204},
  url = {https://doi.org/10.1109/NEMS.2016.7758204},
  researchr = {https://researchr.org/publication/VreedeBTBLBE16},
  cites = {0},
  citedby = {0},
  pages = {74-78},
  booktitle = {11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016},
  publisher = {IEEE},
  isbn = {978-1-5090-1947-2},
}