L. J. de Vreede, J. W. Berenschot, N. R. Tas, W. T. E. van den Beld, J. T. Loessberg-Zahl, A. Van Den Berg, J. C. T. Eijkel. Nanopores created using an internal shadowmask process. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 74-78, IEEE, 2016. [doi]
Abstract is missing.