Gate stack resistance and limits to CMOS logic performance

R. A. Wachnik, S. Lee, L. H. Pan, N. Lu, H. Li, R. Bingert, M. Randall, S. Springer, C. Putnam. Gate stack resistance and limits to CMOS logic performance. In Proceedings of the IEEE 2013 Custom Integrated Circuits Conference, San Jose, CA, USA, September 22-25, 2013. pages 1-4, IEEE, 2013. [doi]

Abstract

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