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Virtual Prototyping of Microdevices and Microsystems

Gerhard K. M. Wachutka. Virtual Prototyping of Microdevices and Microsystems. In Axel Lehmann 0001, Vyacheslav P. Shkodyrev, editors, Proceedings of the Distributed Intelligent Systems and Technologies Workshop, DistIntellSys 2008, St. Petersburg, Russia, June 9-11, 2008. pages 155-162, St. Petersburg State Polytechnical University, 2008.

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