Automated planning and creation of simulation experiments with a domain specific ontology for semiconductor manufacturing AMHS

Thomas Wagner, André Gellrich, Clemens Schwenke, Klaus Kabitzsch, Germar Schneider. Automated planning and creation of simulation experiments with a domain specific ontology for semiconductor manufacturing AMHS. In Stephen J. Buckley, John A. Miller, editors, Proceedings of the 2014 Winter Simulation Conference, Savannah, GA, USA, December 7-10, 2014. pages 2628-2639, IEEE/ACM, 2014. [doi]

Abstract

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