Jian Wan 0002, Seán F. McLoone. Remaining Useful Life Estimation of Lenses for an Ion Beam Etching Tool in Semiconductor Manufacturing Using Deep Convolutional Neural Networks. In Antonio J. Tallón-Ballesteros, Estefanía Cortés-Ancos, Diego A. López García, editors, Electronics, Communications and Networks - Proceedings of the 13th International Conference (CECNet 2023), Macao, China, 17-20 November 2023. Volume 381 of Frontiers in Artificial Intelligence and Applications, pages 68-74, IOS Press, 2023. [doi]
@inproceedings{WanM23, title = {Remaining Useful Life Estimation of Lenses for an Ion Beam Etching Tool in Semiconductor Manufacturing Using Deep Convolutional Neural Networks}, author = {Jian Wan 0002 and Seán F. McLoone}, year = {2023}, doi = {10.3233/FAIA231177}, url = {https://doi.org/10.3233/FAIA231177}, researchr = {https://researchr.org/publication/WanM23}, cites = {0}, citedby = {0}, pages = {68-74}, booktitle = {Electronics, Communications and Networks - Proceedings of the 13th International Conference (CECNet 2023), Macao, China, 17-20 November 2023}, editor = {Antonio J. Tallón-Ballesteros and Estefanía Cortés-Ancos and Diego A. López García}, volume = {381}, series = {Frontiers in Artificial Intelligence and Applications}, publisher = {IOS Press}, isbn = {978-1-64368-481-9}, }