Jian Wan 0002, Seán F. McLoone. Remaining Useful Life Estimation of Lenses for an Ion Beam Etching Tool in Semiconductor Manufacturing Using Deep Convolutional Neural Networks. In Antonio J. Tallón-Ballesteros, Estefanía Cortés-Ancos, Diego A. López García, editors, Electronics, Communications and Networks - Proceedings of the 13th International Conference (CECNet 2023), Macao, China, 17-20 November 2023. Volume 381 of Frontiers in Artificial Intelligence and Applications, pages 68-74, IOS Press, 2023. [doi]
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