An inverse-distance weighting genetic algorithm for optimizing the wafer exposure pattern for enhancing OWE for smart manufacturing

Hung-Kai Wang, Chen-Fu Chien 0001. An inverse-distance weighting genetic algorithm for optimizing the wafer exposure pattern for enhancing OWE for smart manufacturing. Appl. Soft Comput., 94:106430, 2020. [doi]

Abstract

Abstract is missing.