Jer-Chyi Wang, Pai-Chi Chou, Chao Sung Lai, Wen-Hui Lee, Chi-Fong Ai. Characteristics optimization of N::2::O annealing on tungsten nanocrystal with W/Si dual-sputtered method for nonvolatile memory application. Microelectronics Reliability, 50(5):639-642, 2010. [doi]
@article{WangCLLA10,
title = {Characteristics optimization of N::2::O annealing on tungsten nanocrystal with W/Si dual-sputtered method for nonvolatile memory application},
author = {Jer-Chyi Wang and Pai-Chi Chou and Chao Sung Lai and Wen-Hui Lee and Chi-Fong Ai},
year = {2010},
doi = {10.1016/j.microrel.2010.01.027},
url = {http://dx.doi.org/10.1016/j.microrel.2010.01.027},
tags = {optimization},
researchr = {https://researchr.org/publication/WangCLLA10},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {50},
number = {5},
pages = {639-642},
}