Improvement of reliability for high-ohmic Cr-Si thin film resistors in a heat and humid environment: Removing moisture source by electrocatalytic decomposition of water

X. Y. Wang, Q. Cheng, X. P. Ma, H. Zhang, M.-X. Li, T. N. Chen, P. Zhang, J. Q. Shao. Improvement of reliability for high-ohmic Cr-Si thin film resistors in a heat and humid environment: Removing moisture source by electrocatalytic decomposition of water. Microelectronics Reliability, 60:101-108, 2016. [doi]

Abstract

Abstract is missing.