Chen Wang, Fang Chen, Yuan Wang, Sina Sadeghpour, Chenxi Wang, Mathieu Baijot, Rui Esteves, Chun Zhao, Jian Bai, Huafeng Liu, Michael Kraft. Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review. Sensors, 20(14):4054, 2020. [doi]
Abstract is missing.