A MEMS piezoelectric in-plane resonant accelerometer with two-stage micro-leverage mechanism - researchr publication authors

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Yixiang Wang, Hong Ding, Xianhao Le, Jin Xie 0002. A MEMS piezoelectric in-plane resonant accelerometer with two-stage micro-leverage mechanism. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 455-459, IEEE, 2016. [doi]

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