Yixiang Wang, Hong Ding, Xianhao Le, Jin Xie 0002. A MEMS piezoelectric in-plane resonant accelerometer with two-stage micro-leverage mechanism. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 455-459, IEEE, 2016. [doi]
@inproceedings{WangDL016, title = {A MEMS piezoelectric in-plane resonant accelerometer with two-stage micro-leverage mechanism}, author = {Yixiang Wang and Hong Ding and Xianhao Le and Jin Xie 0002}, year = {2016}, doi = {10.1109/NEMS.2016.7758289}, url = {https://doi.org/10.1109/NEMS.2016.7758289}, researchr = {https://researchr.org/publication/WangDL016}, cites = {0}, citedby = {0}, pages = {455-459}, booktitle = {11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016}, publisher = {IEEE}, isbn = {978-1-5090-1947-2}, }