Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab

Nan Wang, Fu-Li Hsiao, Moorthi Palaniapan, Chengkuo Lee. Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 326-330, IEEE, 2012. [doi]

@inproceedings{WangHPL12,
  title = {Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab},
  author = {Nan Wang and Fu-Li Hsiao and Moorthi Palaniapan and Chengkuo Lee},
  year = {2012},
  doi = {10.1109/NEMS.2012.6196785},
  url = {http://dx.doi.org/10.1109/NEMS.2012.6196785},
  researchr = {https://researchr.org/publication/WangHPL12},
  cites = {0},
  citedby = {0},
  pages = {326-330},
  booktitle = {7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012},
  publisher = {IEEE},
  isbn = {978-1-4673-1122-9},
}