Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab

Nan Wang, Fu-Li Hsiao, Moorthi Palaniapan, Chengkuo Lee. Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 326-330, IEEE, 2012. [doi]

Abstract

Abstract is missing.