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Scheduling dual-arm cluster tools with multiple wafer types and residency time constraints

Jipeng Wang, HeSuan Hu, Chunrong Pan, Yuan Zhou 0005, Liang Li. Scheduling dual-arm cluster tools with multiple wafer types and residency time constraints. IEEE CAA J. Autom. Sinica, 7(3):776-789, 2020. [doi]

Authors

Jipeng Wang

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HeSuan Hu

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Chunrong Pan

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Yuan Zhou 0005

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Liang Li

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