Scheduling dual-arm cluster tools with multiple wafer types and residency time constraints

Jipeng Wang, HeSuan Hu, Chunrong Pan, Yuan Zhou 0005, Liang Li. Scheduling dual-arm cluster tools with multiple wafer types and residency time constraints. IEEE CAA J. Autom. Sinica, 7(3):776-789, 2020. [doi]

Abstract

Abstract is missing.