Study of Femtosecond Laser Ablation Effect on Micro-Processing for 4H-SiC Substrate - researchr publication authors

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Chengwu Wang, Syuhei Kurokawa, Julong Yuan, Li Fan, Huizong Lu, Zhe Wu, Weifeng Yao, Kehua Zhang, Yu Zhang, Toshiro Doi. Study of Femtosecond Laser Ablation Effect on Micro-Processing for 4H-SiC Substrate. IJAT, 12(2):187-198, 2018. [doi]

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