Chengwu Wang, Syuhei Kurokawa, Julong Yuan, Li Fan, Huizong Lu, Zhe Wu, Weifeng Yao, Kehua Zhang, Yu Zhang, Toshiro Doi. Study of Femtosecond Laser Ablation Effect on Micro-Processing for 4H-SiC Substrate. IJAT, 12(2):187-198, 2018. [doi]
Abstract is missing.