Yifan Wang, Zewen Liu. Realization of the microchannel with microisland arrays by one-step silicon wet etching process. In 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, China, April 7-11, 2015. pages 557-560, IEEE, 2015. [doi]
Abstract is missing.