Monitoring of micro-stamping procedures utilizing MEMS microphones under acoustic vibration transduction

Chun Min Wang, Yu-Ting Lin, Che-Hsin Lin. Monitoring of micro-stamping procedures utilizing MEMS microphones under acoustic vibration transduction. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 106-109, IEEE, 2017. [doi]

@inproceedings{WangLL17-10,
  title = {Monitoring of micro-stamping procedures utilizing MEMS microphones under acoustic vibration transduction},
  author = {Chun Min Wang and Yu-Ting Lin and Che-Hsin Lin},
  year = {2017},
  doi = {10.1109/NEMS.2017.8016984},
  url = {https://doi.org/10.1109/NEMS.2017.8016984},
  researchr = {https://researchr.org/publication/WangLL17-10},
  cites = {0},
  citedby = {0},
  pages = {106-109},
  booktitle = {12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017},
  publisher = {IEEE},
  isbn = {978-1-5090-3059-0},
}