Chun Min Wang, Yu-Ting Lin, Che-Hsin Lin. Monitoring of micro-stamping procedures utilizing MEMS microphones under acoustic vibration transduction. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 106-109, IEEE, 2017. [doi]
Abstract is missing.