A CMOS-compatible lamb wave resonator for liquid properties sensing

Tao Wang, Chengkuo Lee, Xiaojing Mu, Piotr Kropelnicki, Andrew B. Randles. A CMOS-compatible lamb wave resonator for liquid properties sensing. In 2014 IEEE Ninth International Conference on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP), Singapore, April 21-24, 2014. pages 1-5, IEEE, 2014. [doi]

Abstract

Abstract is missing.