Unified hysteresis and creep compensation in AFM tip positioning with an extended PI model

Zhiyu Wang, Lianqing Liu, Zhidong Wang, Wenxue Wang. Unified hysteresis and creep compensation in AFM tip positioning with an extended PI model. In 2014 IEEE International Conference on Robotics and Automation, ICRA 2014, Hong Kong, China, May 31 - June 7, 2014. pages 1606-1611, IEEE, 2014. [doi]

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