Ying Wang, Wenzhong Lou, Yue Zhao, Fufu Wang. High impact-induced failure of a novel solid MEMS switch. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 755-758, IEEE, 2013. [doi]
Abstract is missing.