Investigation of nonlinear squeeze-film damping involving rarefied gas effect in micro-electro-mechanical systems

Yong Wang, Sha Liu, Congshan Zhuo, Chengwen Zhong. Investigation of nonlinear squeeze-film damping involving rarefied gas effect in micro-electro-mechanical systems. Computers & Mathematics with Applications, 114:188-209, 2022. [doi]

Abstract

Abstract is missing.