Zhiqiang Wang, Xu Ma, Rui Chen, Shengen Zhang, Gonzalo R. Arce. Fast Pixelated Lithographic Source and Mask Joint Optimization Based on Compressive Sensing. IEEE Trans. Computational Imaging, 6:981-992, 2020. [doi]
@article{WangMCZA20,
title = {Fast Pixelated Lithographic Source and Mask Joint Optimization Based on Compressive Sensing},
author = {Zhiqiang Wang and Xu Ma and Rui Chen and Shengen Zhang and Gonzalo R. Arce},
year = {2020},
doi = {10.1109/TCI.2020.3000010},
url = {https://doi.org/10.1109/TCI.2020.3000010},
researchr = {https://researchr.org/publication/WangMCZA20},
cites = {0},
citedby = {0},
journal = {IEEE Trans. Computational Imaging},
volume = {6},
pages = {981-992},
}