Fast Pixelated Lithographic Source and Mask Joint Optimization Based on Compressive Sensing

Zhiqiang Wang, Xu Ma, Rui Chen, Shengen Zhang, Gonzalo R. Arce. Fast Pixelated Lithographic Source and Mask Joint Optimization Based on Compressive Sensing. IEEE Trans. Computational Imaging, 6:981-992, 2020. [doi]

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