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A Cluster-Based Method for Quantitative Characterization and Uncertainty Evaluation of Areal Step Height in Structured Surface Metrology

Chen Wang, Xianyu Meng, Grzegorz Królczyk, Heming Wei. A Cluster-Based Method for Quantitative Characterization and Uncertainty Evaluation of Areal Step Height in Structured Surface Metrology. IEEE T. Instrumentation and Measurement, 71:1-9, 2022. [doi]

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