Jian Wang, Kenneth A. McGreer, Kevin Schmidt, Madhavi Hegde, Jin Hong. Impact of Optical Lithography Resolution on Silicon Arrayed Waveguide Grating Performance. In Optical Fiber Communications Conference and Exhibition, OFC 2019, San Diego, CA, USA, March 3-7, 2019. pages 1-3, IEEE, 2019. [doi]
Abstract is missing.