He Wang, Weirong Nie, Yun Cao, Shenghong Lei, Xiaoyu Kong, Junlin Lu. Design of a novel MEMS Interrupter Device. In 18th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2023, Jeju Island, Korea, Republic of, May 14-17, 2023. pages 237-241, IEEE, 2023. [doi]
Abstract is missing.