Tiancai Wang, Hongling Peng, Peng Cao, Qiandong Zhuang, Jie Deng, Jian Chen, Wanhua Zheng. Low-Energy Ion Implantation and Deep-Mesa Si-Avalanche Photodiodes with Improved Fabrication Process. Sensors, 24(2):640, January 2024. [doi]
Abstract is missing.