Jipeng Wang, Chunrong Pan, HeSuan Hu, Yuan Zhou 0005. Scheduling of single-arm cluster tools with multi-type wafers and shared PMs. In 13th IEEE Conference on Automation Science and Engineering, CASE 2017, Xi'an, China, August 20-23, 2017. pages 1046-1051, IEEE, 2017. [doi]
Abstract is missing.