Chenying Wang, Jiangtao Pu, Lei Li, Weixuan Jing, Yijun Zhang, Yaxin Zhang, Feng Han, Ming Liu, Wei Ren, Zhuangde Jiang. Effect of the Different Substrates and the Film Thickness on the Surface Roughness of Step Structure. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 47-50, IEEE, 2021. [doi]
Abstract is missing.