Zhe Wang, Xian Qin. The manufacture of micropillars with high depth-to-width ratio, and the comparison between two typical materials. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 677-680, IEEE, 2012. [doi]
Abstract is missing.