A MEMS resonant tilt sensor with high sensitivity maintained in the whole 360° measurement range

Shudong Wang, Juan Ren, Tianyi Zhang, Yinsheng Weng, Zhuangde Jiang, Xueyong Wei. A MEMS resonant tilt sensor with high sensitivity maintained in the whole 360° measurement range. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

Authors

Shudong Wang

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Juan Ren

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Tianyi Zhang

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Yinsheng Weng

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Zhuangde Jiang

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Xueyong Wei

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