A MEMS resonant tilt sensor with high sensitivity maintained in the whole 360° measurement range

Shudong Wang, Juan Ren, Tianyi Zhang, Yinsheng Weng, Zhuangde Jiang, Xueyong Wei. A MEMS resonant tilt sensor with high sensitivity maintained in the whole 360° measurement range. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

Abstract

Abstract is missing.