A novel bulk micromachined tunneling gyroscope

Lingyun Wang, Yuanzhe Su, Yi Lei, Wenwang Li, Yifang Liu, Daoheng Sun. A novel bulk micromachined tunneling gyroscope. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 873-876, IEEE, 2011. [doi]

Authors

Lingyun Wang

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Yuanzhe Su

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Yi Lei

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Wenwang Li

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Yifang Liu

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Daoheng Sun

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