A novel bulk micromachined tunneling gyroscope

Lingyun Wang, Yuanzhe Su, Yi Lei, Wenwang Li, Yifang Liu, Daoheng Sun. A novel bulk micromachined tunneling gyroscope. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 873-876, IEEE, 2011. [doi]

@inproceedings{WangSLLLS11,
  title = {A novel bulk micromachined tunneling gyroscope},
  author = {Lingyun Wang and Yuanzhe Su and Yi Lei and Wenwang Li and Yifang Liu and Daoheng Sun},
  year = {2011},
  doi = {10.1109/NEMS.2011.6017492},
  url = {http://dx.doi.org/10.1109/NEMS.2011.6017492},
  researchr = {https://researchr.org/publication/WangSLLLS11},
  cites = {0},
  citedby = {0},
  pages = {873-876},
  booktitle = {6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  publisher = {IEEE},
}