Junbo Wang, Yanlong Shang, Sheng Tu, Lei Liu, Deyong Chen. Micro-machined resonant accelerometer with high sensitivity. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 527-530, IEEE, 2011. [doi]
Abstract is missing.