Tao Wang, Zhengjie Tang, Huamao Lin, Kun Zhan, Jiang Wan, Shihao Wu, Yuandong Gu, Wenbo Luo, Wanli Zhang. A Low Temperature Drifting Acoustic Wave Pressure Sensor with an Integrated Vacuum Cavity for Absolute Pressure Sensing. Sensors, 20(6):1788, 2020. [doi]
Abstract is missing.