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Chemo-mechanical polish lithography: A pathway to low loss large-scale photonic integration on lithium niobate on insulator

Min Wang, Rongbo Wu, Jintian Lin, Jianhao Zhang, Zhiwei Fang, Zhifang Chai, Ya Cheng. Chemo-mechanical polish lithography: A pathway to low loss large-scale photonic integration on lithium niobate on insulator. Quantum Eng., 1(1), 2019. [doi]

Authors

Min Wang

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Rongbo Wu

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Jintian Lin

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Jianhao Zhang

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Zhiwei Fang

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Zhifang Chai

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Ya Cheng

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