Min Wang, Rongbo Wu, Jintian Lin, Jianhao Zhang, Zhiwei Fang, Zhifang Chai, Ya Cheng. Chemo-mechanical polish lithography: A pathway to low loss large-scale photonic integration on lithium niobate on insulator. Quantum Eng., 1(1), 2019. [doi]
@article{WangWLZFCC19,
title = {Chemo-mechanical polish lithography: A pathway to low loss large-scale photonic integration on lithium niobate on insulator},
author = {Min Wang and Rongbo Wu and Jintian Lin and Jianhao Zhang and Zhiwei Fang and Zhifang Chai and Ya Cheng},
year = {2019},
doi = {10.1002/que2.9},
url = {https://doi.org/10.1002/que2.9},
researchr = {https://researchr.org/publication/WangWLZFCC19},
cites = {0},
citedby = {0},
journal = {Quantum Eng.},
volume = {1},
number = {1},
}