Shihang Wang, Yancheng Wang, Deqing Mei, Songqiao Dai. Development of an Annular-Shaped Bernoulli Gripper for Contactless Gripping of Large-Size Silicon Wafer. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1871-1876, IEEE, 2021. [doi]
Abstract is missing.