Mingyu Wang, Yaqiong Wang, Zhan Yang, Tao Chen, Lining Sun, Toshio Fukuda. Detection and Compensation of Motion Error for Nanomanipulation Platform in Scanning Electron Microscope. In 15th International Conference on Control, Automation, Robotics and Vision, ICARCV 2018, Singapore, November 18-21, 2018. pages 98-102, IEEE, 2018. [doi]
Abstract is missing.