Control Strategy for a Low Cost Manipulator to Transport and Align IC Mask-Plates

Jianhua Wang, De Xu, Min Tan, Yun Liu. Control Strategy for a Low Cost Manipulator to Transport and Align IC Mask-Plates. IEEE Trans. Contr. Sys. Techn., 17(5):1018-1027, 2009. [doi]

Abstract

Abstract is missing.