Haoxu Wang, Liqiang Xie, Xuezhong Wu, Shengyi Li. Sidewall arris flatting process in quartz gyroscope fabrication. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 250-254, IEEE, 2010. [doi]
Abstract is missing.