Monolithic BEOL Integration of Phase Change Materials for Reconfigurable Silicon Photonics

Weiquan Wang, Kai Xu, Maoliang Wei, Kunhao Lei, Boshu Sun, Yiting Yun, Junying Li, Lan Li, Hongtao Lin. Monolithic BEOL Integration of Phase Change Materials for Reconfigurable Silicon Photonics. In Optical Fiber Communications Conference and Exhibition, OFC 2025, San Francisco, CA, USA, March 30 - April 3, 2025. pages 1-3, IEEE, 2025. [doi]

Abstract

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